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Description Of Mg Doped Lithium Niobate - China

price: contact company for price

Mg-doped lithium niobate crystals (MgLiNbO3) is a

relatively difficult crystal etching, the dry etching

MgLiNbO3 rate and etching morphology control is lithium

niobate optoelectronic devices one of the key technologies

in processing. The Plasmalab System 100 Oxford instruments

used to SF6 / Ar to etching gas, specific research MgLiNbO3

with inductively coupled plasma (ICP) etching rate power,

reactive ion etching (RIE), power, air chamber pressure and

gas flow ratio of the change of the etching parameters, such

as, at the same time study found SF6 / (Ar + SF6 gas flow

ratio can also affect the etching the roughness of the

surface. The experimental results show that: in the ICP

power is 1000 W, RIE power is 150 W, the standard state (0

C, 1 standard atmospheric pressure) gas under traffic for

52 mL/min, the pressure of 0.532 Pa, SF6 / SF6 (Ar +) under

the condition of gas volume fraction of 0.077, the etching

rate can be up to 152 nm/min, etching the surface roughness

is 1.37 nm, etching depth is 2.5 mu m can be obtained, the

surface of the wall Angle is 74.8 ° MgLiNbO3 flat ridge

shape structure.


Company Contact:


  • Phone: 8653166956298

  • Address: China, jinan, China

  • Email: Email


Published date: May 29, 2013 -

  • Business Description: Jinan Jingzheng electronic co., LTD. Is a professional production of

    thin lithium tantalite, magnesium doped lithium niobate movies, LNOI

    magnesium doped lithium niobate company

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