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  • Description Of Mg Doped Lithium Niobate - China

    price: contact company for price

    Mg-doped lithium niobate crystals (MgLiNbO3) is a

    relatively difficult crystal etching, the dry etching

    MgLiNbO3 rate and etching morphology control is lithium

    niobate optoelectronic devices one of the key technologies

    in processing. The Plasmalab System 100 Oxford instruments

    used to SF6 / Ar to etching gas, specific research MgLiNbO3

    with inductively coupled plasma (ICP) etching rate power,

    reactive ion etching (RIE), power, air chamber pressure and

    gas flow ratio of the change of the etching parameters, such

    as, at the same time study found SF6 / (Ar + SF6 gas flow

    ratio can also affect the etching the roughness of the

    surface. The experimental results show that: in the ICP

    power is 1000 W, RIE power is 150 W, the standard state (0

    C, 1 standard atmospheric pressure) gas under traffic for

    52 mL/min, the pressure of 0.532 Pa, SF6 / SF6 (Ar +) under

    the condition of gas volume fraction of 0.077, the etching

    rate can be up to 152 nm/min, etching the surface roughness

    is 1.37 nm, etching depth is 2.5 mu m can be obtained, the

    surface of the wall Angle is 74.8 ° MgLiNbO3 flat ridge

    shape structure.


    Company Contact:


    • Phone: 8653166956298

    • Address: China, jinan, China

    • Email: Email


    Published date: May 29, 2013 -

    • Business Description: Jinan Jingzheng electronic co., LTD. Is a professional production of

      thin lithium tantalite, magnesium doped lithium niobate movies, LNOI

      magnesium doped lithium niobate company

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