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66--Cryogenic Vacuum Probe Station (OB1760246) (2005-09-14)

(i) This is a combined synopsis/solicitation for commercial items prepared in
accordance with the format in FAR Subpart 12.6, as supplemented with
additional information included in this notice. This announcement constitutes
the only solicitation; proposals are being requested and a written
solicitation will not be issued. (ii) The solicitation number is W911QX-05-T-
0226. This acquisition is issued as a Request for Proposal. (iii) The
solicitation document and incorporated provisions and clause s are those in
effect through Federal Acquisition Circular 2005-05. (iv) This action is
100% set-aside for small businesses. The associated NAICS code is 334516. The
small business size standard is 500 employees. The following is a list of
contract l ine item number(s) and items, quantities and units of measure: (v)
CLIN 0001 Cryogenic Vacuum Probe Station
One (1) Each (vi) Description of requirements: The
Army Research Laboratory (ARL) requires a full four-inch wafer cryogenic
vacuum probe station, to be used for fundamental electrical and electro-
optical analysis of nanoscale electronic devices. SALIENT CHARACTERISTICS (1)
Full four-inch wafer probing capability, with the ability to probe partial
wafers, is required. (2) The vacuum probe station must be configured with six
precision micro-manipulated probe arms, with four of the arms oriented
orthogonally (at 90-degree relative spacing), and each having precision x-, y-
, and z-control with ranges of at least five (5) inches in x, at least two (2)
inches in y, and at least one half (1/2) inch in z. (3) The vacuum probe
station must be constructed of stainless steel. In addition to the six probe
arm ports, the vacuum chamber must have a pumping port having NW40 or larger
connection, a spare NW25 connection port, and an integral fused quartz
viewport to visually locate the probes on the wafer. (4) The system must have
an external microscope imaging capability having resolution of 3 micrometers
or better. The external microscope imaging capability must be enabled for
remote viewing (e.g., via a video monitor) during probe adjustment. (5) The
system must be able to perform electrical probing measurements at controlled
temperatures in the range of 4.5K 475K. The sample stage must be integrated
with both the cryogenic refrigerator and heater elements, and regulated by a
temperature con troller. (6) The capability to cryogenically cool the sample
stage using either liquid helium or liquid nitrogen is required. The system
must include a high efficiency helium transfer line and a liquid nitrogen
Dewar with pressure control. (7) Active radiation shielding of the vacuum
chamber is required to provide efficient cryogenic cooling and shield the
sample under test from blackbody radiation associated with the chamber or
surrounding environment. (8) The probe station must be capable of making
fundamental current/voltage (I/V) measurements on a full four-inch wafer in
DC, RF, or microwave (up to 40GHz) frequency regimes. (9) The low frequency
probes must be matched to 50 ohm resistance and capable of shielded
measurements up to 50MHz, or up to 5 GHz when used with appropriate low-loss
microwave cabling. Probe tips with diameters of 3 micrometers and 10
micrometers are req uired, in tungsten, BeCu, and Paliney 7 alloy. For higher
frequency measurements, probe tips with diameters of 10 micrometers and 25
micrometers are required, in BeCu. (10) The microwave probes must be of
coplanar waveguide ground-signal-ground design and function in the frequency
range of 0-40 GHz. They must have probe planarization capability relative to
the sample enabling at least five (5) degrees of adjustment in b oth positive
and negative theta directions. (11) The probe station must employ dynamic
cooling/heating of all of the probes to hold the probe tips at the same
temperature as the device under test, to preven t heat transfer near the
sample and thus minimize measurement error. (12) The system must have the
capability for in-situ sample imaging and/or spectroscopic analysis using a
fiber-optic feedthrough. (13) The system must have the capability for
installation of and operation using a metered gas flow. (14) The system must
be outfitted with a turbopump for vacuum control. Backing pump, bellows
connection, vacuum gauging for high vacuum and forelines, controller,
adapters, and pump-line vibration isolation must be provided. The probe
station chamber mus t be able to maintain a base pressure of at least 5x10-6
torr at 5K. (15) The probe station must be mounted on a pneumatically
controlled self-leveling vibration isolation table. (16) The probe station
must have a grounded sample holder, but must be configured to install a coax
or triax sample holder for microwave probing applications. The coax and triax
sample stages must be available as standard options. (17) The sample stage
must be translatable in the x-, y-, and theta-directions, with a range of at
least two inches in the x- and y-directions, and a rotation range of at least
5 degrees in both positive and negative theta directions. (18) Required
configuration: The probe station is to be provided with all six probe arms
configured with cables and probe tips that will enable operation from DC to
50MHz. One of the probe arms is to be modified to hold a fiberoptic at the
sample end. An other of the probe arms is to be modified to provide a
capillary gas supply tube down the length of the probe arm, terminating
external to the probe arm base. A third arm must be configured with a
thermocouple to monitor probe temperature. Two additional probe arms are to
be configured with ground-signal-ground microwave probes and associated cables
to enable electrical probing at frequencies from DC to 40GHz. The high
frequency probe arms are to be supplied separately from the probe station. The
pitch s pacing of the microwave probes will be specified upon contract award.
(19) On-site installation and on-site training of up to 5 people is required.
(20) Standard commercial warranty must be provided. (vii) Delivery is required
4 months after contract award. Delivery shall be made to Zahl Building ,
Adelphi Laboratory Center, 2800 Powder Mill Road, Adelphi, MD. Acceptance
shall be performed at the Adelphi Laboratory Center. The FOB point is the
Adelp hi Laboratory Center, MD. (viii) The provision at 52.212-1,
Instructions to Offerors - Commercial, applies to this acquisition. The
following addenda have been attached to this provision: N/A. (ix) The
provision at FAR 52.212-2, Evaluation - Commercial Items is applicable to this
acquisition. The specific evaluation criteria in descending order of
importance to be included in paragraph (a) of that provision are as follows:
(1) Compliance with the salient characteristics listed in (vi) above, (2)
Past Performance offerors must submit organization or company, point of
contact and telephone number of at least three previous sales of the same or
similar equipment made during the past five years. The offerors record of
providing full wafer vacuum cryoge nic probe stations that meet
specifications, record of meeting delivery schedule, and service reputation
will be considered, and (3) Price. The Government reserves the right to award
to other than the lowest offer and to make award without discussions. (x)
Offerors shall include a completed copy of the provision at FAR 52.212-3,
Offeror Representations and Certifications - Commercial Items, and DFARS
252.212-7000, Offeror Representations and Certifications -Commercial Items,
with its offer. (xi) The c lause at 52.212-4, Contract Terms and Conditions -
Commercial Items, applies to this acquisition. The following addenda have
been attached to this clause: N/A. (xii) The clause at 52.212-5, Contract
Terms and Conditions Required to Implement Statutes o r Executive Orders -
Commercial Items and DFARS 252.212-7001, Contract Terms and Conditions
Required to Implement Statutes or Executive Orders Applicable to Defense
Acquisitions of Commercial Items, applies to this acquisition. The following
additional FA R/DFARS clauses cited in this clause are applicable: 52.203-3;
52.203-6; 52.219-6; 52.219-8; 52.222-3; 52.222-19; 52.222-21; 52.222-26;
52.222-35; 52.222-36; 52.222-37; 52.222-39; 52.232-33; 252.225-7012; 252.225-
7014; 252.243-7002; 252.247-7023; and, 252. 247-7024. (xiii) The following
additional contract requirement(s) or terms and conditions apply: Standard
commercial warranty must be provided. (xiv) This acquisition is rated under
the Defense Priorities and Allocations System (DPAS) as: N/A. (xv) Th e
following notes apply to this announcement: N/A. (xvi) Offers are due on 20
September, by 1200 Noon EST, at RDECOM Acquisition Center, Adelphi
Contracting Division, ATTN: AMSRD-ACC-AC, 2800 Powder Mill Road, Adelphi, MD
20783-1197. (xvii) For infor mation regarding this solicitation, please
contact Robert M. Tomko, 301-394-3691, Fax 301-394-1891 or email to
[Please use the link below]. Email submission of solicitation is preferred.

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