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Crystal Ion Slicing Lithium Niobate Film - China

price: contact company for price

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Products Photos Catalog Crystal Ion Slicing Photos Catalog

The recently developed crystal epitaxial lift-off technique,

namely CIS (crystal ion slicing), enables one to slice a thin

film (about lm) from a bulk material wafer by ion

implantation.

Ion implantation is used to create a buried

sacrificial layer in the single-crystal wafer, inducing a

different etching selectivity between the sacrificial layer

and the rest of the sample.

In this study, the LiNbO3 single-

crystal sample was implanted by 250 keV 4He ions with a 1 ยท

1017 ions/cm2 fluence.

A 0.6 lm lift-off film was obtained

with a following hydrofluoric acid etching.


Company Contact:


  • Phone: 8653166956298

  • Address: China , jinan , China

  • Email: Email


Published date: March 1, 2013

  • Business Description: Jinan Jingzheng electronic co., LTD. Is a professional production of

    thin lithium tantalite, magnesium doped lithium niobate movies, LNOI

    magnesium doped lithium niobate company

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