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  • Crystal Ion Slicing Lithium Niobate Film - China

    price: contact company for price

    The recently developed crystal epitaxial lift-off technique,

    namely CIS (crystal ion slicing), enables one to slice a thin

    film (about lm) from a bulk material wafer by ion

    implantation.

    Ion implantation is used to create a buried

    sacrificial layer in the single-crystal wafer, inducing a

    different etching selectivity between the sacrificial layer

    and the rest of the sample.

    In this study, the LiNbO3 single-

    crystal sample was implanted by 250 keV 4He ions with a 1 ยท

    1017 ions/cm2 fluence.

    A 0.6 lm lift-off film was obtained

    with a following hydrofluoric acid etching.


    Company Contact:


    • Phone: 8653166956298

    • Address: China , jinan , China

    • Email: Email


    Published date: March 1, 2013

    • Business Description: Jinan Jingzheng electronic co., LTD. Is a professional production of

      thin lithium tantalite, magnesium doped lithium niobate movies, LNOI

      magnesium doped lithium niobate company

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