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Mg Doped Lithium Niobate - China

price: contact company for price

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Products Photos Catalog Doped Lithium Niobate Photos Catalog

Mg-doped lithium niobate crystals (MgLiNbO3) is a relatively

difficult crystal etching, the dry etching MgLiNbO3 rate and

etching morphology control is lithium niobate optoelectronic

devices one of the key technologies in processing.

The

Plasmalab System 100 Oxford instruments used to SF6 / Ar to

etching gas, specific research MgLiNbO3 with inductively

coupled plasma (ICP) etching rate power, reactive ion

etching (RIE), power, air chamber pressure and gas flow

ratio of the change of the etching parameters, such as, at

the same time study found SF6 / (Ar + SF6 gas flow ratio can

also affect the etching the roughness of the surface.

The

experimental results show that: in the ICP power is 1000 W,

RIE power is 150 W, the standard state (0 C, 1 standard

atmospheric pressure) gas under traffic for 52 mL/min, the

pressure of 0.532 Pa, SF6 / SF6 (Ar +) under the condition

of gas volume fraction of 0.077, the etching rate can be up

to 152 nm/min, etching the surface roughness is 1.37 nm,

etching depth is 2.5 mu m can be obtained, the surface of

the wall Angle is 74.8 ° flat ridge MgLiNbO3 structure.


Company Contact:


  • Phone: 8653166956298

  • Address: China , jinan , China

  • Email: Email


Published date: May 27, 2013

  • Business Description: Jinan Jingzheng electronic co., LTD. Is a professional production of

    thin lithium tantalite, magnesium doped lithium niobate movies, LNOI

    magnesium doped lithium niobate company

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