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  • Pe Hpcvd Plasma Enhanced Hybrid Physical Chemical Vapor Deposition Furnace - China

    price: 39100.00 Dollar US$

    This product is a 1200℃ plasma enhanced hybrid physical chemical vapor deposition (HPCVD) dual heating zone rotary tube furnace system.

    The equipment includes a dual heating zone tube furnace, a set of tungsten filament evaporation source, a set of plasma generator and a set of mass flowmeter system.

    Its working principle is to evaporate the reactant at the gas inlet end through the evaporation source and load it into the heating zone of the tube furnace through the airflow to carry out the CVD reaction.

    At the same time, the reaction is promoted by plasma enhancement.

    It is suitable for the heat treatment of inorganic composite powder and the surface coating uniformity (e.g. prepare Li-Ion battery cathode powders with conductive coatings on sample surface).


    Company Contact:


    • Phone: +86 37155199322

    • Address: No. 820, 8th Floor, 1st Unit, 9th Block, Cuizhu Street, High-Tech Zone, zhengzhou , HeNan , China

    • Email: Email


    Published date: November 27, 2020

    • Business Description: Our mainlyproducts include high temperature furnace,include 1200/1400/1700 degree muffle furnace,1200/1400/1700 degree tube furnace, dental furnace, vacuum furnace,gold melting furnace, SiC heating element, MoSi2 heating element, alumina tubes and crucibles, and etc.

      We have our own manufacturing base factory as while as many sub-contracting factories, which enable us a reliable manufacturing ability and quality control system.

      We are capable of supplying both the equipment and technologies according to customers' different requirements and realities, and we have lots of successful projects in many different countries and regions, like East Europe, South Asia, South America, Australia and New Zealand, and Africa.

      "Profession, Quick Response, Hard Work, and Sincerity" is the strength of our team, earning us a sound reputation among our clients.

      We are open and willing to work with clients from different countries and regions.

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