Double Target Magnetron Sputtering Coater With Bias Power Supply - China

Double target magnetron sputtering coater is a small laboratory coater with two targets developed by our company.

It can be used to prepare single or multi-layer ferroelectric film, conductive film, alloy film, semiconductor film, ceramic film, dielectric film, optical film, etc.

Compared with ordinary plasma sputtering, magnetron sputtering has the advantages of high energy, high speed, high coating rate and low sample temperature rise, which is a typical high-speed low-temperature sputtering.

The magnetron target is equipped with a water-cooled inter layer, the water cooler can effectively take away heat, avoid heat gathering on the target surface, and make the magnetron coating work stably for a long time.

In addition, the device is also equipped with bias power supply, which can add bias electric field between the target and the sample platform, enhance the energy of ions, improve the film quality and adhesion of the film.

The whole machine adopts touch screen control, one key coating procedure, simple operation, and is an ideal equipment for preparing thin film in the laboratory.

Technical parameters:

Sample stage size：φ140mm

Heating temperature：MAX.

500℃

Accuracy：±1℃

Speed：1~20rpm adjustable

Magnetron sputtering head: Number: two, 2-inch;Cooling mode: Water cooling, 10L / min flow rate

Vacuum Chamber Size：φ300mm × 300mm H

Vacuum Chamber Material：stainless steel

Observation window：φ100mm

Opening mode：Open top, easy to replace the target

Gas flow controller: 2 ways: Ar, N2;Range 0-100sccm

Vacuum pump: Molecular pump system, pumping speed: 600L/S

Film thickness gauge: Quartz vibrating film thickness gauge, resolution: 0.10 μ M

Sputtering power supply: One DC power supply, 1000W, suitable for preparing metal film; One RF power supply, 500W, suitable for non-metallic coating

Operation mode: Panel button operation

Dimensions: 1400mm × 750mm × 1300mm

Weight: 300 KG

Company Contact:

• Posted By: Zhengzhou CY Scientific Instrument Co., Ltd.

• Phone: +86 37155199322

• Address: No. 820, 8th Floor, 1st Unit, 9th Block, Cuizhu Street, High-Tech Zone, zhengzhou , HeNan , China

• Email:

• Website: https://www.cysi.wang

• Business Description: Our mainlyproducts include high temperature furnace,include 1200/1400/1700 degree muffle furnace,1200/1400/1700 degree tube furnace, dental furnace, vacuum furnace,gold melting furnace, SiC heating element, MoSi2 heating element, alumina tubes and crucibles, and etc.
  
  We have our own manufacturing base factory as while as many sub-contracting factories, which enable us a reliable manufacturing ability and quality control system.
  
  We are capable of supplying both the equipment and technologies according to customers' different requirements and realities, and we have lots of successful projects in many different countries and regions, like East Europe, South Asia, South America, Australia and New Zealand, and Africa.
  
  "Profession, Quick Response, Hard Work, and Sincerity" is the strength of our team, earning us a sound reputation among our clients.
  
  We are open and willing to work with clients from different countries and regions.