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Lithography Assembly Component Thermal Vacuum Cleaning System - China

price: 570000.00 Dollar US$

Lithography Assembly Component Thermal Vacuum Cleaning System

Products Photos Catalog Lithography Assembly Photos Catalog

Critical Applications 1 - EUV Lithography Systems Mirror & Collector Optics Cleaning – Eliminates Sn droplets and carbon buildup.

Reticle & Pellicle Maintenance – Ensures zero mask defects.

Vacuum Chamber Conditioning – Prevents contamination in EUV source modules.

2 - DUV Lithography & Advanced Packaging Lens & Prism Decontamination – Stops haze formation.

Wafer Chuck & Stage Recovery – Restores optimal electrostatic clamping.

3 - R&D & Failure Analysis Prototype Surface Prep – Clean surfaces for SEM, TEM, XPS analysis.

If you need more models about our test equipment, please reference our ： chamber-testing(Click)com


Company Contact:


  • Phone: 86076985914911

  • Address: No. 5, Wenzhou Road, Dongcheng Sub-district, Dongguan , Guangdong , China

  • Email: Email


Published date: August 27, 2025

  • Business Description: TESTEQ focuses on the research, development and manufacturing of HALT HASS chambers, accelerated life tests, low-pressure temperature and humidity test chambers, thermal vacuum test chambers, constant temperature and humidity test chambers, thermal shock test chambers, and environmental testing equipment.

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