Plasma Etching Cleaner - China

The plasma etch process is the removal of certain material from another substrate surface to leave a desired pattern.

A mask helps prevent the material underneath from being etched.

In general, the process in the plasma etching system involves ion bombardment to remove material.

The process gas should be chosen so the rate of removal of the uncovered material is higher than the removal rate of the masking material.

This process is generally used in the semiconductor industries.

Plasma Etching Cleaner is a reactive ion etching device for semiconductor microfabrication dry etching.

It features a compact design, simple operation, and excellent process repeatability.

With the RIE plasma etching mode, it offers fast etching, high uniformity, high selectivity, and strong anisotropy.

Plasma Etching Systems Features：

RIE mode for high-selectivity anisotropic etching, meeting strict process demands.

Full - area gas showerhead and axisymmetric exhaust ensure high process uniformity and speed.

Heating and lower electrode cooling maintain stable etching temperature, rate, and uniformity.

13.56MHz solid - state RF plasma power with auto impedance matching guarantees optimal plasma density and repeatability.

Three gas channels with high - precision flow meters enable flexible process and gas selection.

Applications:

Etching materials like Si, SiO2, SiN, Poly-Si, GaAs, Mo, Pt, polyimide, etc.

Photoresist ashing, hydrophilic and hydrophobic modification, surface energy enhancement, introduction of functional groups, improvement of biocompatibility, etc.

Company Contact:

• Posted By: Shenzhen Naen Technology Co,. Ltd

• Phone: 8617798508268

• Address: 5th Floor, Building A, Huamingcheng High tech Industrial Park, Guangming District, Shenzhen , Guangdong , China

• Email:

• Website: https://www.cnplasma.com/

• Business Description: NaenTech was founded in 2010 and is headquartered in Shenzhen with a research and development branch in Hong Kong.
  
  It is a high-tech company that focuses on the research and development, manufacturing, and sales of plasma material surface cleaning, vacuum coating technology, and high-end intelligent equipment.
  
  Its main products currently include atmospheric/vacuum plasma cleaning machines, magnetron sputtering coating equipment, ion sputtering instruments, plasma etching equipment, plasma surface treatment equipment, and glow discharge devices.
  
  The core R&D team of the company is sourced from the Plasma Laboratory of the University of Hong Kong, the School of Materials Engineering of the Hong Kong Polytechnic University, and the School of Microelectronics at the Georgia Institute of Technology in the United States.
  
  Since its establishment, Naen tech has focused on the technical layout of the core power supply and underlying algorithms required for plasma processing systems, continuously expanding its independent design capabilities.
  
  It has completed the development of an RF chip development platform with MCU and ARM as its core, achieving structured and modular development of the chips.
  
  With design capabilities in high-precision simulation, network impedance matching, power drive, power devices, RF, and underlying core algorithms, it can quickly make bottom-level hardware combinations for different sub-fields of plasma processing system requirements to improve the stability and efficiency of plasma systems.
  
  The company focuses on a global strategic layout and has established offices in Beijing, Shanghai, Chengdu, and Xiamen in China, as well as office liaisons in Singapore, Munich, Toronto, and other locations.
  
  Naen tech plays a crucial role in China's high-end manufacturing equipment industry with its cutting-edge innovation concept and leading core technology.
  
  The company adheres to its sacred mission of "promoting industry progress, safeguarding national defense security, and improving the quality of life," and is committed to becoming a global leading supplier of plasma technology processing solutions.
  
  It aims to continue writing a new legend of China's plasma industry development on the world's high-tech stage through fierce competition with other players.