Smif Specification Lpi - China

Wafer Size: 200mm

Cassette Pick-up Position: 909mm (35.8 inches)

Cassette Positioning: To within ±0.005 inches (vertical)

SMIF-Pod Load Height: 900mm (35.5 inches)

Nominal Maximum Reach of Load Arm: (Measured from front face of LPT to H-bar of SMIF-Pod) 307mm (12.10 inches)

Reversed Cassette Orientation Height: 1578mm (62.13 inches) Width: 457mm (18.00 inches) Depth: 478mm (18.81 inches) Weight: (Without SMIF-Pod, cassette, wafers) 170 pounds(77.27kg)

Speed of travel (Minienvironment): 57.2mm (2.25 inches)

per second Mounting: Tool mount.

May make use of an interface frame calibrated to lock the LPT into a repeatable position onto the Process Tool.

Power: 3.5 Amp (100-120vac) 2 Amp (230vac) Laser NOTE: LPT is a Class I Laser product when used with a SMIF-Pod Diode Laser; Wavelength = 670 nm Laser Power = <1mW (Class II) Communications: Serial RS-232C (SECS I / SECS II), RS-485 (optional), Bi-directional Parallel LAN

Transmission cycle<90s; Repositioning accuracy of 0.127mm; The cleanliness level is superior to Class 1;

Direction error<0.2mm

Mature and stable Interlock system

Wafer Traceable Identification System SMART TAG

Integrated self diagnosis and advanced diagnostic software for easy design and troubleshooting.

Company Contact:

• Posted By: Honghu (Suzhou) Semiconductor Technology Co.，Ltd

• Phone: 17361797118

• Address: yuanhe road, suzhou , jiangsu , China

• Email:

• Business Description: Honghu (Suzhou) Semiconductor Technology Co., Ltd. was established in Suzhou in 2016 - We provide the advanced wafer transfer automation equipment for semiconductor industry with our years experience in wafer handle and transfer technology.
  
  Honghu’s wafer transfer module systems include: Sorter/EFEM, Vacuum Transmission Module(VTM),SMIF and Ion implant Graphite.
  
  Honghu provides the leading quality equipment and maintenance technical services, as well as trade services for consumables and spare parts.