Wafer Vacuum Transfer Module Robot - China

Item Specifications Specifications Actual indicators

Payload (End-effector + wafer / each wrist) 1kg 1kg 1.2kg

Range of Motion R1-axis (extension) 730mm 730mm 729.9mm

R2-axis (extension) 730mm 730mm 729.8mm

T-axis (rotation) 360° 360° 360°

Z-axis (elevation) ≤150mm ≤150mm 150.2mm

Repeatability(300 times measured) R1-axis (extension) ± 0.05mm ± 0.05mm ± 0.037mm

R2-axis (extension) ± 0.05mm ± 0.05mm ± 0.038mm

T-axis (rotation) ± 0.003° 0.005° 0.0029°

Z-axis (elevation) ± 0.05mm ± 0.05mm ± 0.035mm

Minimum rotation diameter 525mm 525mm 524.9mm

Base Vacuum 5 x 10−8 Torr 5 x 10−8 Torr 2 x 10−9 Torr

Leak Rate <1 x 10−9std.

cc/sec He <1 x 10−9std.

cc/sec He <8 x 10−10std.

cc/sec He

VTM Core parts -wafer vaccum transfer module ( Hong Hu self-research )

Honghu vaccum transfer module introduction

R (radial) axis:

Measuring range: 1010mm

Repeatability: ±0.05mm

T (rotation) axis:

Range: Infinite rotation

Repeated positioning accuracy: ±0.003°

Z (vertical) axis: 50mm, 100mm, 150mm

Repeated positioning accuracy: ±0.05mm

Leakage rate: <1*10-9 std.

cc/sec-He

Base Vaccum: <5*10-7 vaccum

Particle Perfermence: ISO Level 1

Power Supply: 85 to 265VAC/50HZ, 2.65A/230VAC

Communication: Ethernet Teach Method: Teach Pendant and Robot Studio Software

Operating temperature: 10ºC-40ºC

Storage temperature: -25ºC to 50ºC

Humidity: 50% to 80% (non-condensing)

Company Contact:

• Posted By: Honghu (Suzhou) Semiconductor Technology Co.，Ltd

• Phone: 17361797118

• Address: yuanhe road, suzhou , jiangsu , China

• Email:

• Business Description: Honghu (Suzhou) Semiconductor Technology Co., Ltd. was established in Suzhou in 2016 - We provide the advanced wafer transfer automation equipment for semiconductor industry with our years experience in wafer handle and transfer technology.
  
  Honghu’s wafer transfer module systems include: Sorter/EFEM, Vacuum Transmission Module(VTM),SMIF and Ion implant Graphite.
  
  Honghu provides the leading quality equipment and maintenance technical services, as well as trade services for consumables and spare parts.