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Description Of Mg Doped Lithium Niobate - China
price: contact company for price
Mg-doped lithium niobate crystals (MgLiNbO3) is a
relatively difficult crystal etching, the dry etching
MgLiNbO3 rate and etching morphology control is lithium
niobate optoelectronic devices one of the key technologies
in processing.
The Plasmalab System 100 Oxford instruments
used to SF6 / Ar to etching gas, specific research MgLiNbO3
with inductively coupled plasma (ICP) etching rate power,
reactive ion etching (RIE), power, air chamber pressure and
gas flow ratio of the change of the etching parameters, such
as, at the same time study found SF6 / (Ar + SF6 gas flow
ratio can also affect the etching the roughness of the
surface.
The experimental results show that: in the ICP
power is 1000 W, RIE power is 150 W, the standard state (0
C, 1 standard atmospheric pressure) gas under traffic for
52 mL/min, the pressure of 0.532 Pa, SF6 / SF6 (Ar +) under
the condition of gas volume fraction of 0.077, the etching
rate can be up to 152 nm/min, etching the surface roughness
is 1.37 nm, etching depth is 2.5 mu m can be obtained, the
surface of the wall Angle is 74.8 ° MgLiNbO3 flat ridge
shape structure.
Company Contact:
- Posted By: Jinan Jingzheng Electronics Co., Ltd.
- Phone: 8653166956298
- Address: China , jinan , China
- Email:
- Website: https://www.nanoln.com
Published date: May 29, 2013
- Business Description: Jinan Jingzheng electronic co., LTD. Is a professional production of
thin lithium tantalite, magnesium doped lithium niobate movies, LNOI
magnesium doped lithium niobate company
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